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Record link: 
http://hdl.handle.net/20.500.12708/163982
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Title: 
Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films
en
Citation: 
Bethge, O., Pozzovivo, G., Henkel, C., Abermann, S., & Bertagnolli, E. (2012). Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films. Journal of Micromechanics and Microengineering, 22(8), 085013. https://doi.org/10.1088/0960-1317/22/8/085013
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Publisher DOI: 
10.1088/0960-1317/22/8/085013
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Bethge, O 
Pozzovivo, G 
Henkel, Christoph 
Abermann, S 
Bertagnolli, E 
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Organisational Unit: 
E362 - Institut für Festkörperelektronik 
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Journal: 
Journal of Micromechanics and Microengineering 
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ISSN: 
0960-1317
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Date (published): 
2012
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Number of Pages: 
6
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Mechanical Engineering; Mechanics of Materials; Electronic, Optical and Magnetic Materials
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Research Areas: 
Nanoelectronics: 30%
Surfaces and Interfaces: 40%
Materials Characterization: 30%
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
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