Record link: 
http://hdl.handle.net/20.500.12708/180933
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Title: 
Feature scale modeling for etching and deposition processes in semiconductor manufacturing
en
Citation: 
Pyka, W. (2000). Feature scale modeling for etching and deposition processes in semiconductor manufacturing [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/180933
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CatalogPlus: 
AC03012055
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Publication Type: 
Thesis - Dissertation
en
Language: 
English
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Authors: 
Pyka, Wolfgang 
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Advisor: 
Selberherr, Siegfried 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Date (published): 
2000
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Number of Pages: 
102
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Keywords: 
Halbleiterbauelement; Fertigung; Ätzen; Deposition; Dreidimensionale Geometrie; Simulation
de
Additional information: 
Zsfassung in dt. Sprache
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Appears in Collections:
Thesis

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