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Year of Publication
Record link:
http://hdl.handle.net/20.500.12708/187467
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Title:
Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations
en
Citation:
Bradley, R. M., & Hobler, G. (2023). Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations.
Journal of Applied Physics
,
133
(6), 065303. https://doi.org/10.1063/5.0137324
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Publisher DOI:
10.1063/5.0137324
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Publication Type:
Article - Original Research Article
en
Language:
English
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Authors:
Bradley, R. Mark
Hobler, Gerhard
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Organisational Unit:
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
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Journal:
Journal of Applied Physics
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ISSN:
0021-8979
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Date (published):
14-Feb-2023
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Number of Pages:
13
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Publisher:
AMER INST PHYSICS
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Peer reviewed:
Yes
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Keywords:
nanoscale; Monte Carlo simulations; surfaces
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Research Areas:
Surfaces and Interfaces: 50%
Modeling and Simulation: 50%
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Science Branch:
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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