Record link: 
http://hdl.handle.net/20.500.12708/187467
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Title: 
Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations
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Citation: 
Bradley, R. M., & Hobler, G. (2023). Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations. Journal of Applied Physics, 133(6), 065303. https://doi.org/10.1063/5.0137324
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Publisher DOI: 
10.1063/5.0137324
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Publication Type: 
Article - Original Research Article
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Language: 
English
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Authors: 
Bradley, R. Mark 
Hobler, Gerhard 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Journal: 
Journal of Applied Physics 
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ISSN: 
0021-8979
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Date (published): 
14-Feb-2023
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Number of Pages: 
13
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Publisher: 
AMER INST PHYSICS
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Peer reviewed: 
Yes
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Keywords: 
nanoscale; Monte Carlo simulations; surfaces
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Research Areas: 
Surfaces and Interfaces: 50%
Modeling and Simulation: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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