Investigating snap-through dynamics in bistable MEMS based on buckled elastic structures

Abstract

We conducted an in-depth exploration of snap-through behavior in bistable Micro-Electro-Mechanical Systems (MEMS), using piezoelectric microplates as our representative system. Under several assumptions, including that the plate was thin and homogeneous, models for the plate deflections were derived from von Karman plate theory, coupled to a strain compatibility equation. The complexity of the partial differential equation (PDE) system was managed through the Galerkin method, transforming it into interconnected nonlinear ordinary differential equations (ODEs). Using a Python framework for numerical solutions, we investigated the effects of various piezoelectric tones on snap-through behaviors. The nuanced relationship between tone combinations and their impact on snap-through timing was highlighted. Certain dual tones could accelerate, delay, enable, or completely inhibit snap-through. These insights offer avenues for more controlled, efficient, and innovative applications in MEMS devices, particularly where rapid snap-through is essential.