Record link: 
http://hdl.handle.net/20.500.12708/188245
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Title: 
Sputtering from Sinusoidal Surfaces: Monte Carlo Simulations and Comparison to Analytical Results
en
Citation: 
Hobler, G., & Bradley, R. M. (2023). Sputtering from Sinusoidal Surfaces: Monte Carlo Simulations and Comparison to Analytical Results. In SKM 2023 - scientific programme. Verhandlungen der Deutschen Physikalischen Gesellschaft e.V., Dresden, Germany. Deutsche Physikalische Gesellschaft e.V. http://hdl.handle.net/20.500.12708/188245
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Hobler, Gerhard 
Bradley, R. Mark 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
E362 - Institut für Festkörperelektronik 
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Published in: 
SKM 2023 - scientific programme 
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Date (published): 
27-Mar-2023
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Event name: 
Verhandlungen der Deutschen Physikalischen Gesellschaft e.V. 
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Event date: 
27-Mar-2023 - 31-Mar-2023
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Event place: 
Dresden, Germany
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Number of Pages: 
1
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Publisher: 
Deutsche Physikalische Gesellschaft e.V.
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Keywords: 
sputter yield; surface roughness; binary collision approximation; simulation
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Link (external): 
https://www.dpg-verhandlungen.de/year/2023/conference/skm/part/o/session/13/contribution/3?lang=en
https://www.dpg-verhandlungen.de/year/2023/conference/skm/downloads
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Research Areas: 
Surfaces and Interfaces: 50%
Modeling and Simulation: 50%
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Science Branch: 
2100 - Nanotechnologie: 50%
1030 - Physik, Astronomie: 50%
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Appears in Collections:
Conference Paper

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