Poik, M., Hackl, T., Di Martino, S., Schober, M., Dang, J., & Schitter, G. (2023). Model-Based RF Sensing for Contactless High-Resolution Voltage Measurements. IEEE Transactions on Instrumentation and Measurement, 72, 1–8. https://doi.org/10.1109/TIM.2023.3317385
IEEE Transactions on Instrumentation and Measurement
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ISSN:
0018-9456
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Date (published):
20-Sep-2023
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Number of Pages:
8
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Publisher:
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Peer reviewed:
Yes
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Keywords:
Contactless; passive voltage probe; radio frequency (RF); voltage measurement
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Abstract:
The development of highly integrated microwave devices greatly benefits from precise knowledge of internal device voltages. Contact-based probing techniques can only provide external measurements and are limited by the size of the necessary contact pads. The contactless voltage sensing method presented in this paper enables measurements of radio frequency (RF) voltages within microwave devices. By using a conductive cantilever probe with a sharp tip as capacitively coupled sensor measurements can be performed at precisely known tip-surface distances. In combination with the proposed model-based cross-talk compensation method this enables measurements at high spatial resolution. The RF sensing system is implemented and experimentally verified. Voltages at frequencies up to 13 GHz on 2 μm-sized structures are measured, while improving the measurement sensitivity by a factor of 4.9 with respect to conventional contactless sensing techniques.
