The characterization of layered structures from the nanometer range to the 10 µm range is of increasing importance, especially if the analytical methods are non-destructive. The third part of the workshop, presented by Klaudia Hradil, will include the theoretical background and experimental techniques of thin film analysis by X-ray diffraction methods. This will include the experimental techniques and the analysis of data for grazing incidence diffraction. The possibilities for the microstructure properties analysis of thin films like stress/strain and texture analysis, classical phase analysis and thin film crystallinity properties with lab methods will be introduced for selected examples.