Record link: 
http://hdl.handle.net/20.500.12708/193678
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Title: 
IB-ThP-2 Roadmap for Focused Ion Beam Technologies
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Citation: 
Höflich, K., Hobler, G., Allen, F., Wirtz, T., Rius, G., & Hlawacek, G. (2023). IB-ThP-2 Roadmap for Focused Ion Beam Technologies. In AVS 69th International Symposium & Exhibition: Abstract Book (pp. 190–190). http://hdl.handle.net/20.500.12708/193678
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Publication Type: 
Inproceedings - Abstract Book Contribution
en
Language: 
English
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Authors: 
Höflich, K. 
Hobler, Gerhard 
Allen, F. 
Wirtz, T. 
Rius, G. 
Hlawacek, Gregor 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Published in: 
AVS 69th International Symposium & Exhibition: Abstract Book 
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Date (published): 
9-Nov-2023
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Event name: 
AVS 69th International Symposium & Exhibition 
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Event date: 
5-Nov-2023 - 10-Nov-2023
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Event place: 
Portland, United States of America (the)
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Number of Pages: 
1
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Keywords: 
focused ion beam; ion sources; sputtering; detectors; materials engineering
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Research Areas: 
Materials Characterization: 30%
Nanoelectronics: 30%
Modeling and Simulation: 40%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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