Record link: 
http://hdl.handle.net/20.500.12708/204129
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Title: 
Roadmap for Focused Ion Beam Technologies
en
Citation: 
Höflich, K., Hobler, G., Allen, F., Wirtz, T., Ruis Gemma, & Hlawacek, G. (2024). Roadmap for Focused Ion Beam Technologies. In IBMM2024 International Conference on Ion Beam Modification of Materials (IBMM): Abstract Book. 23rd International Conference on Ion Beam Modification of Materials (IBMM2024), London, United Kingdom of Great Britain and Northern Ireland (the). http://hdl.handle.net/20.500.12708/204129
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Publication Type: 
Inproceedings - Poster Contribution
en
Language: 
English
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Authors: 
Höflich, Katja 
Hobler, Gerhard 
Allen, Frances 
Wirtz, Tom 
Ruis Gemma 
Hlawacek, Gregor 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Published in: 
IBMM2024 International Conference on Ion Beam Modification of Materials (IBMM): Abstract Book 
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Date (published): 
2024
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Event name: 
23rd International Conference on Ion Beam Modification of Materials (IBMM2024) 
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Event date: 
1-Jul-2024 - 5-Jul-2024
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Event place: 
London, United Kingdom of Great Britain and Northern Ireland (the)
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Number of Pages: 
1
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Keywords: 
focused ion beam; Ion sources; beam transport; detectors; correlative approach; FIB induced deposition; kinetic Monte Carlo; sputtering
en
Additional information: 
focused ion beam; Ion sources; beam transport; detectors; correlative approach; binary collision approximation; molecular dynamics; kinetic Monte Carlo; continuum modeling; sputtering; materials engineering; defects; imaging; tomography; secondary ion mass spectrometry; FIB induced deposition; Plasmonics; Superconductivity; Photomasks; Scanning electron microscopy; Interatomic potentials; Nanocrystals; Nanomaterials; Adsorp
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Research Areas: 
Materials Characterization: 35%
Nanoelectronics: 30%
Modeling and Simulation: 35%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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