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TU Wien Academic Press
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Year of Publication
Record link:
http://hdl.handle.net/20.500.12708/224299
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Title:
Decoupling Adaptation of a 3-DoF Dual-Stage Positioning System for High-Precision Optical Inline Metrology
en
Citation:
Pechgraber, D., Heumesser, F., Csencsics, E., & Schitter, G. (2025). Decoupling Adaptation of a 3-DoF Dual-Stage Positioning System for High-Precision Optical Inline Metrology. In
Proceedings of the ASPE 2025 Annual Meeting
(pp. 153–158).
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Publication Type:
Inproceedings - Full-Paper Contribution
en
Language:
English
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Authors:
Pechgraber, Daniel
Heumesser, Florian
Csencsics, Ernst
Schitter, Georg
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Organisational Unit:
E369-01 - Forschungsbereich Mechatronische Systeme
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Published in:
Proceedings of the ASPE 2025 Annual Meeting
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ISBN:
978-1-887706-62-9
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Volume:
85
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Date (published):
2025
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Event name:
ASPE 2025 Annual Meeting
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Event date:
3-Nov-2025 - 7-Nov-2025
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Event place:
San Diego, United States of America (the)
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Number of Pages:
6
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Keywords:
Mechatronics; Dual-Stage Positioning; Parameter Identification
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Research Areas:
Modeling and Simulation: 30%
Automation and Robotics: 40%
Sensor Systems: 30%
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Science Branch:
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper
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