Record link: 
http://hdl.handle.net/20.500.12708/225856
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Title: 
TiN/TiB and NbC/TiB superlattice thin films via multi-cathode DC magnetron sputtering
en
Citation: 
Pinter, T., Du, C., Fuchs, D., Astecker, T., Wojcik, T., & Mayrhofer, P. H. (2025, September 15). TiN/TiB and NbC/TiB superlattice thin films via multi-cathode DC magnetron sputtering [Conference Presentation]. FEMS 2025 EUROMAT, Granada, Spain. http://hdl.handle.net/20.500.12708/225856
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Publication Type: 
Presentation - Conference Presentation
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Language: 
English
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Authors: 
Pinter, Thomas 
Du, Chunhui 
Fuchs, Dominik 
Astecker, Thomas 
Wojcik, Tomasz 
Mayrhofer, Paul Heinz 
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Organisational Unit: 
E308-01-1 - Forschungsgruppe Werkstoffwissenschaft Dünner Schichten 
E308-01-3 - Forschungsgruppe Computergestütztes Materialdesign 
E164-01-2 - Forschungsgruppe Oberflächen-, Spurenanalytik und Chemometrie 
E308-01-2 - Forschungsgruppe Angewandte Oberflächentechnik 
E308-03-1 - Forschungsgruppe Metallurgische Verarbeitungstechnologien 
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Date (published): 
15-Sep-2025
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Event name: 
FEMS 2025 EUROMAT 
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Event date: 
14-Sep-2025 - 18-Sep-2025
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Event place: 
Granada, Spain
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Keywords: 
PVD; superlattice; thin films; mechanical properties
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Research facilities: 
Röntgenzentrum 
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie 
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Research Areas: 
Materials Characterization: 25%
Surfaces and Interfaces: 25%
Structure-Property Relationsship: 50%
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Science Branch: 
2030 - Maschinenbau: 20%
2050 - Werkstofftechnik: 80%
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