Record link: 
http://hdl.handle.net/20.500.12708/232438
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Title: 
Quantitative LEIS measurements with Monte-Carlo simulations on silicon oxide
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Citation: 
Pichler, J., Bocaniciu, C.-G., Celebi, A. T., & Valtiner, M. (2026, April 27). Quantitative LEIS measurements with Monte-Carlo simulations on silicon oxide [Poster Presentation]. Conference on Applied Surface Technology (COAST 2026), Wien, Austria.
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Publication Type: 
Presentation - Poster Presentation
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Language: 
English
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Authors: 
Pichler, Julian 
Bocaniciu, Camil-Gratian 
Celebi, Alper Tunga 
Valtiner, Markus 
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Organisational Unit: 
E134-02 - Forschungsbereich Applied Interface Physics 
E056-12 - Fachbereich ENROL DP 
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Date (published): 
27-Apr-2026
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Event name: 
Conference on Applied Surface Technology (COAST 2026) 
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Event date: 
27-Apr-2026 - 29-Apr-2026
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Event place: 
Wien, Austria
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Keywords: 
Monte Carlo simulations; sputtering; LEIS
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Research Areas: 
Surfaces and Interfaces: 100%
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Science Branch: 
1030 - Physik, Astronomie: 100%
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