Langegger, R. (2014). Advanced nanopattern formation by focused ion beam induced self organisation [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/78338
The interaction of focused ion beams with various semiconductors and semi-metals was investigated in this thesis. Parameter variation with respect ion fluence, beam incidence angle, temperature, acceleration voltage and scanning strategy lead to a variety of surface modifications. Furthermore the oxidation behaviour of Germanium with respect to implanted ion doses were investigated. At last channeling effect on Bismuth found to be critically depending on the specimen temperature.
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