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Year of Publication
Title:
Ion diffusion and migration in semiconductor passivation and encapsulation materials
en
Language:
English
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Authors:
Schwab, Stefan
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Qualification level:
Doctoral
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Advisor:
Hutter, Herbert
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Issue Date:
2017
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Citation:
Schwab, S. (2017).
Ion diffusion and migration in semiconductor passivation and encapsulation materials
[Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/79615
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Number of Pages:
98
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Keywords:
Ionendiffusion; Ionenmigration; Halbleiter; Transistoren; Zuverlässigkeit; Analytik; TOF-SIMS
de
Ion diffusion; Ion migration; Ion mobility; Semiconductor; Reliability; Analytics; TOF-SIMS
en
URI:
http://hdl.handle.net/20.500.12708/79615
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Library ID:
AC14479160
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Organisation:
E164 - Institut für Chemische Technologien und Analytik
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Publication Type:
Thesis
en
Hochschulschrift
de
Appears in Collections:
Thesis
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