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Record link:
http://hdl.handle.net/20.500.12708/79751
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Title:
Development and characterization of PZT thin films for MEMS applications
en
Citation:
Petschnigg, M. (2021).
Development and characterization of PZT thin films for MEMS applications
[Diploma Thesis, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/79751
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CatalogPlus:
AC16148345
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Publication Type:
Thesis - Diplomarbeit
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Language:
English
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Authors:
Petschnigg, Madeleine
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Advisor:
Hutter, Herbert
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Organisational Unit:
E164 - Institut für Chemische Technologien und Analytik
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Date (published):
2021
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Number of Pages:
84
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Keywords:
Thin films; PZT; MEMS
en
Additional information:
Zusammenfassung in deutscher Sprache
Abweichender Titel nach Übersetzung der Verfasserin/des Verfassers
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Appears in Collections:
Thesis
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