Record link: 
http://hdl.handle.net/20.500.12708/153232
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Title: 
Wet Chemical Etching of CaO-SiO₂-B₂O₃ Ternary System as Crystallizing Glass in an LTCC System
de
Citation: 
Hajian, A., Liu Zhifu, Smetaczek, S., Konegger, T., Zellner, C., Limbeck, A., & Schmid, U. (2022). Wet Chemical Etching of CaO-SiO₂-B₂O₃ Ternary System as Crystallizing Glass in an LTCC System [Conference Presentation]. CICMT 2022 - Ceramic Interconnect and Ceramic Microsystems Technologies, Wien, Austria.
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Publication Type: 
Presentation - Conference Presentation
en
 
Vortrag - Conference Presentation
de
Language: 
German
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Authors: 
Hajian, Ali 
Liu Zhifu 
Smetaczek, Stefan 
Konegger, Thomas 
Zellner, Christopher 
Limbeck, Andreas 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E164-04-3 - Forschungsgruppe Festkörperionik 
E164-03-1 - Forschungsgruppe Anorganische Werkstoffe 
E164-01-2 - Forschungsgruppe Oberflächen-, Spurenanalytik und Chemometrie 
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Date (published): 
2022
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Event name: 
CICMT 2022 - Ceramic Interconnect and Ceramic Microsystems Technologies 
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Event date: 
13-Jul-2022 - 15-Jul-2022
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Event place: 
Wien, Austria
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Keywords: 
LTCC System; CaO-SiO₂-B₂O₃; Crystallizing Glass; Wet Chemical Etching
en
Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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