Filipovic, L., Baumgartner, O., Piso, J., Bobinac, J., Reiter, T., Strof, G., Rzepa, G., Stanojevic, Z., & Karner, M. (2022). DTCO Flow for Air Spacer Generation and its Impact on Power and Performance at N7. In SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet (pp. 34–35). http://hdl.handle.net/20.500.12708/153577