Record link: 
http://hdl.handle.net/20.500.12708/156140
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Title: 
Methods of simulating thin film deposition using spray pyrolysis techniques
en
Citation: 
Filipovic, L., Selberherr, S., Mutinati, G. C., Brunet, E., Steinhauer, S., Köck, A., Teva, J., Kraft, J., Siegert, J., & Schrank, F. (2014). Methods of simulating thin film deposition using spray pyrolysis techniques. Microelectronic Engineering, 117, 57–66. https://doi.org/10.1016/j.mee.2013.12.025
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Publisher DOI: 
10.1016/j.mee.2013.12.025
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Filipovic, Lado 
Selberherr, Siegfried 
Mutinati, Giorgio C. 
Brunet, Elise 
Steinhauer, Stephan 
Köck, Anton 
Teva, Jordi 
Kraft, Jochen 
Siegert, Jörg 
Schrank, Franz 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
E165-01 - Forschungsbereich Physikalische Chemie 
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Journal: 
Microelectronic Engineering 
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ISSN: 
0167-9317
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Date (published): 
1-Apr-2014
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Number of Pages: 
10
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Surfaces, Coatings and Films
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Research Areas: 
Modelling and Simulation: 50%
Computational Materials Science: 50%
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Science Branch: 
Elektrotechnik, Elektronik
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