Record link: 
http://hdl.handle.net/20.500.12708/157231
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Title: 
Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes
en
Citation: 
Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 104(23), 233501. https://doi.org/10.1063/1.4882177
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Publisher DOI: 
10.1063/1.4882177
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Publication Type: 
Artikel - Original Research Article
de
 
Article - Original Research Article
en
Language: 
English
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Authors: 
Kucera, Martin 
Wistrela, Elisabeth 
Pfusterschmied, Georg 
Ruiz-Díez, Víctor 
Manzaneque, Tomás 
Luis Sánchez-Rojas, José 
Schalko, Johannes 
Bittner, Achim 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E366-50 - Services des Instituts 
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Journal: 
Applied Physics Letters 
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ISSN: 
0003-6951
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Date (published): 
9-Jun-2014
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Number of Pages: 
5
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Publisher: 
AIP PUBLISHING
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Peer reviewed: 
Yes
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Keywords: 
Physics and Astronomy (miscellaneous)
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Research Areas: 
Sensor Systems: 50%
Structure-Property Relationship: 25%
Special and Engineering Materials: 25%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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