Bethge, O., Abermann, S., Henkel, C., Straif, C. J., Hutter, H., & Bertagnolli, E. (2009). Impact of Germanium Surface Conditioning and ALD-growth Temperature on Al₂O₃/ZrO₂ High-k Dielectric Stacks. Journal of The Electrochemical Society, 156(10), G168. https://doi.org/10.1149/1.3205455
E164-01-2 - Forschungsgruppe Oberflächen-, Spurenanalytik und Chemometrie E362 - Institut für Festkörperelektronik
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Zeitschrift:
Journal of The Electrochemical Society
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ISSN:
0013-4651
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Datum (veröffentlicht):
2009
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Umfang:
5
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Verlag:
ELECTROCHEMICAL SOC INC
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Peer Reviewed:
Ja
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Keywords:
Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Renewable Energy, Sustainability and the Environment; Surfaces, Coatings and Films; Materials Chemistry; Electrochemistry
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Forschungsschwerpunkte:
Structure-Property Relationship: 10% Special and Engineering Materials: 30% Materials Characterization: 20% Surfaces and Interfaces: 10% Nanoelectronics: 30%
