Record link: 
http://hdl.handle.net/20.500.12708/176850
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Title: 
Numerische Modellierung der Beweglichkeit in verspanntem Silizium
de
Citation: 
Kosina, H. (2022, October 13). Numerische Modellierung der Beweglichkeit in verspanntem Silizium [Conference Presentation]. CiS MEMS Workshop, Erfurt, Germany.
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Publication Type: 
Presentation - Conference Presentation
en
Language: 
German
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Authors: 
Kosina, Hans 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
E360-01 - Forschungsbereich Mikroelektronik 
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Date (published): 
13-Oct-2022
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Event name: 
CiS MEMS Workshop 
de
Event date: 
13-Oct-2022
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Event place: 
Erfurt, Germany
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Keywords: 
pressure sensor; piezoresistance coefficients; band structure; strained silicon
en
Project title: 
Quantenmechanische Berechnung elektronischer Parameter: 1661279 (CiS Forschungsinstitut für Mikrosensorik GmbH) 
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Research Areas: 
Modeling and Simulation: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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