Record link: 
http://hdl.handle.net/20.500.12708/193514
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Title: 
Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs
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Citation: 
Reiter, T., & Filipovic, L. (2023). Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs. In S. Y. Yurish (Ed.), Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT ’2023)) (pp. 67–72). https://doi.org/10.13140/RG.2.2.13265.71524
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Publisher DOI: 
10.13140/RG.2.2.13265.71524
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Language: 
English
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Authors: 
Reiter, Tobias 
Filipovic, Lado 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Published in: 
Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT '2023)) 
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Date (published): 
20-Sep-2023
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Event name: 
5th International Conference on Microelectronic Devices and Technologies (MicDAT '2023)) 
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Event date: 
20-Sep-2023 - 22-Oct-2023
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Event place: 
Funchal, Portugal
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Number of Pages: 
6
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Peer reviewed: 
Yes
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Keywords: 
Process simulation; Plasma etching; High-aspect-ratio; Ray tracing
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Project title: 
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells) 
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Research Areas: 
Nanoelectronics: 50%
Modeling and Simulation: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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