Datensatz Zitierlink: 
http://hdl.handle.net/20.500.12708/208622
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Titel: 
Control of nonlinearity enables 3D silicon processing
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Zitat: 
Demesh, M., Tolstik, N., Sorokin, E., Kalashnikov, V., Rudenkov, A., Einmo, E., Di Sabatino, M., & Sorokina, I. T. (2024). Control of nonlinearity enables 3D silicon processing. In High-Brightness Sources and Light-Driven Interactions Congress. Optica High-Brightness Sources and Congress Light-Driven Interactions Congress, Wien, Austria. https://doi.org/10.1364/MICS.2024.MTh2C.4
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Verlags-DOI: 
10.1364/MICS.2024.MTh2C.4
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Publikationstyp: 
Konferenzbeitrag - Beitrag in einem Abstract Book
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Sprache: 
Englisch
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Autor_innen: 
Demesh, Maksim 
Tolstik, N. 
Sorokin, Evgeni 
Kalashnikov, Vladimir 
Rudenkov, A. 
Einmo, Eskil 
Di Sabatino, M. 
Sorokina, I. T. 
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Organisations­einheit: 
E387-01 - Forschungsbereich Photonik 
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Erschienen in: 
High-Brightness Sources and Light-Driven Interactions Congress 
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ISBN: 
978-1-957171-35-7
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Datum (veröffentlicht): 
2024
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Veranstaltungs­name: 
Optica High-Brightness Sources and Congress Light-Driven Interactions Congress 
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Veranstaltungs­zeitraum: 
12-Mär-2024 - 14-Mär-2024
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Veranstaltungs­ort: 
Wien, Österreich
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Umfang: 
1
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Keywords: 
Kerr effect; Silicon; ultrafast lasers
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Abstract: 
We demonstrate effective control of the shape and depth of sub-wavelength-sized structures in silicon through repeatable single pulse modifications at the optimum wavelength of 2.1 μm, which provides a balance of Kerr-effect and multi-photon absorption.
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Forschungs­schwerpunkte: 
Materials Characterization: 10%
Photonics: 60%
Modeling and Simulation: 30%
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Wissenschafts­zweig: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Enthalten in den Sammlungen:
Conference Paper

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