Record link: 
http://hdl.handle.net/20.500.12708/212132
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Title: 
Merging Reactor and Feature Scales for Plasma Etch Modeling
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Citation: 
Filipovic, L. (2024). Merging Reactor and Feature Scales for Plasma Etch Modeling. In IEEE NANO 2024 Book of Abstracts (pp. 120–120).
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Filipovic, Lado 
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Organisational Unit: 
E360-01 - Forschungsbereich Mikroelektronik 
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials 
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Published in: 
IEEE NANO 2024 Book of Abstracts 
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Date (published): 
2024
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Event name: 
IEEE Nano 2024 
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Event date: 
8-Jul-2024 - 11-Jul-2024
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Event place: 
Gijon, Spain
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Number of Pages: 
1
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Keywords: 
Multi-scale process modeling; Reactor-scale surrogate model
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Project title: 
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells) 
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Research Areas: 
Digital Transformation in Manufacturing: 50%
Modeling and Simulation: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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