Modeling and simulation of ALD in a level set framework

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Title:

Citation:

Filipovic, L. (2024). Modeling and simulation of ALD in a level set framework. In EFDS: Program Booklet: ALD for Industry (pp. 24–24).

Publication Type:

Inproceedings - Abstract Book Contribution

Language:

English

Authors:

Organisational Unit:

E360-01 - Forschungsbereich Mikroelektronik
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials

Published in:

EFDS: Program Booklet: ALD for Industry

Date (published):

2024

Event name:

7th Workshop ALD for Industry, Tutorial and Industrial Exhibition 2024

Event date:

12-Mar-2024 - 13-Mar-2024

Event place:

Dresden, Germany

Number of Pages:

Keywords:

ALD modeling

Project title:

Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells)

Research Areas:

Modeling and Simulation: 100%

Science Branch:

2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%

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