Record link: 
http://hdl.handle.net/20.500.12708/222853
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Title: 
Morphological Effects and Impurity Levels on the High-Temperature Electrical Insulation of reactively sputtered AlN
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Citation: 
Salvadores Farran, N., Wojcik, T., Jerg, C., Gies, A., Ramm, J., Kolozsvári, S., Polcik, P., Fleig, J., Huber, T. M., Ntemou, E., Primetzhofer, D., & Riedl, H. (2025, May 13). Morphological Effects and Impurity Levels on the High-Temperature Electrical Insulation of reactively sputtered AlN [Conference Presentation]. The 51st International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2025), San Diego, United States of America (the).
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Publication Type: 
Presentation - Conference Presentation
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Language: 
English
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Authors: 
Salvadores Farran, Norma 
Wojcik, Tomasz 
Jerg, Carmen 
Gies, Astrid 
Ramm, Jürgen 
Kolozsvári, Szilard 
Polcik, Peter 
Fleig, Jürgen 
Huber, Tobias M. 
Ntemou, Eleni 
Primetzhofer, Daniel 
Riedl, Helmut 
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Organisational Unit: 
E308-01-2 - Forschungsgruppe Angewandte Oberflächentechnik 
E164-04-3 - Forschungsgruppe Festkörperionik 
E308-03-1 - Forschungsgruppe Metallurgische Verarbeitungstechnologien 
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Date (published): 
13-May-2025
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Event name: 
The 51st International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2025) 
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Event date: 
11-May-2025 - 16-May-2025
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Event place: 
San Diego, United States of America (the)
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Keywords: 
HiPIMS; High temperature dielectrics; impedance spectroscopy
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Project title: 
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten: CDL-SEC (Christian Doppler Forschungsgesells) 
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Research Areas: 
Materials Characterization: 30%
Surfaces and Interfaces: 70%
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Science Branch: 
2030 - Maschinenbau: 20%
2050 - Werkstofftechnik: 80%
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Appears in Collections:
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