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Record link: 
http://hdl.handle.net/20.500.12708/68411
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Title: 
Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation
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Citation: 
Bohmayr, W., Burenkov, A., Lorenz, J., Ryssel, H., & Selberherr, S. (1995). Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation. In Simulation of Semiconductor Devices and Processes (pp. 492–495). https://doi.org/10.1007/978-3-7091-6619-2_119
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Publisher DOI: 
10.1007/978-3-7091-6619-2_119
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Authors: 
Bohmayr, W. 
Burenkov, A. 
Lorenz, J. 
Ryssel, H. 
Selberherr, S. 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Published in: 
Simulation of Semiconductor Devices and Processes 
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Date (published): 
1995
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Event name: 
International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP) 
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Event date: 
26-Sep-1988 - 28-Sep-1988
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Event place: 
Bologna, Austria
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Number of Pages: 
4
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Peer reviewed: 
No
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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