Journal of Micromechanics and Microengineering

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

Results 1-20 of 30 (Search time: 0.004 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Brandhoff, Lukas ; Zirath, Helene ; Salas, Mariugenia ; Haller, Anna ; Peham, Johannes ; Wiesinger-Mayr, Herbert ; Spittler, Andreas ; Schnetz, Guntram ; Lang, Walter ; Vellekoop, Michael J A multi-purpose ultrasonic streaming mixer for integrated magnetic bead ELISAsArtikel Article 2015
2Riesch, C ; Reichel, E K ; Jachimowicz, A ; Schalko, J ; Hudek, P ; Jakoby, B ; Keplinger, F A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readoutArtikel Article 2009
3Schmid, U ; Krötz, G ; Schmitt-Landsiedel, D A Volumetric Flow Sensor for Automotive Injection SystemsArtikel Article2008
4Wang, W B ; Fu, Y Q ; Chen, J J ; Xuan, W P ; Chen, J K ; Wang, X Z ; Mayrhofer, P ; Duan, P F ; Bittner, A ; Schmid, U ; Luo, J K AlScN thin film based surface acoustic wave devices with enhanced microfluidic performanceArtikel Article 2016
5Ruiz-Díez, V ; Manzaneque, T ; Hernando-García, J ; Ababneh, A ; Kucera, M ; Schmid, U ; Seidel, H ; Sánchez-Rojas, J L Design and characterization of AlN-based in-plane microplate resonatorsArtikel Article2013
6Farsari, M. ; Filippidis, G. ; Zoppel, Sandra ; Reider, Georg ; Fotakis, C. Efficient femtosecond laser micromachining of bulk 3C-SiCArtikel Article2005
7Sökmen, Ü ; Stranz, A ; Waag, A ; Ababneh, A ; Seidel, H ; Schmid, U ; Peiner, E Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applicationsArtikel Article2010
8Bethge, O ; Pozzovivo, G ; Henkel, Christoph ; Abermann, S ; Bertagnolli, E Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum filmsArtikel Article 2012
9Stöber, L ; Konrath, J P ; Krivec, S ; Patocka, F ; Schwarz, S ; Bittner, A ; Schneider, M ; Schmid, U Impact of sputter deposition parameters on molybdenum nitride thin film propertiesArtikel Article2015
10Schmid, Silvan ; Kühne, S.D. ; Hierold, C. Influence of air humidity on polymeric microresonatorsArtikel Article2009
11Dabsch Alexander - 2017 - MEMS cantilever based magnetic field gradient sensor.pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz MEMS cantilever based magnetic field gradient sensorArticle Artikel May-2017
12Sanchez-Rojas, J L ; Hernando, J ; Donoso, A ; Bellido, J C ; Manzaneque, T ; Ababneh, A ; Seidel, H ; Schmid, U Modal optimization and filtering in piezoelectric microplate resonatorsArtikel Article2010
13Aguinsky, Luiz Felipe ; Wachter, Georg ; Manstetten, Paul ; Rodrigues, Frâncio ; Trupke, Michael ; Schmid, Ulrich ; Hössinger, Andreas ; Weinbub, Josef Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity ResonatorsArtikel Article 2021
14Ruiz-Díez, V ; Hernando-García, J ; Toledo, J ; Manzaneque, T ; Kucera, M ; Pfusterschmied, G ; Schmid, U ; Sánchez-Rojas, J L Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid MediaArtikel Article 2016
15Ruiz-Díez, V ; Hernando-García, J ; Manzaneque, T ; Kucera, M ; Schmid, U ; Sánchez-Rojas, J L Modelling out-of-plane and in-plane resonant modes of microplates in liquid mediaArtikel Article2015
16Dabsch, Alexander ; Rosenberg, Christoph ; Klug, Patrick ; Stifter, Michael ; Keplinger, Franz Multiaxial resonant MEMS force sensorArtikel Article 2018
17Stampfl, J ; Baudis, S ; Heller, C ; Liska, R ; Neumeister, A ; Kling, R ; Ostendorf, A ; Spitzbart, M Photopolymers with tunable mechanical properties processed by laser based high-resolution stereolithographyArtikel Article2008
18Stampfl, J ; Baudis, Stefan ; Heller, Christian ; Liska, Robert ; Neumeister, Andre ; KLING, Rainer ; Ostendorf, Andreas ; Spitzbart, Manfred Photopolymers with tunable mechanical properties processed by laser-based high-resolution stereolithographyArticle Artikel 2008
19Toledo, J ; Manzaneque, T ; Ruiz-Díez, V ; Kucera, M ; Pfusterschmied, G ; Wistrela, E ; Schmid, U ; Sánchez-Rojas, J L Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquidsArtikel Article 2016
20Larsen, T ; Schmid, S ; Dohn, S ; Sader, J E ; Boisen, A ; Villanueva, L G Position and mode dependent optical detection back-action in cantilever beam resonatorsArtikel Article 2017