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| | Preview | Author(s) | Title | Type | Issue Date |
| 21 | | Riedl, H. ; Koller, C.M. ; Munnik, F. ; Hutter, H. ; Mendez Martin, F. ; Rachbauer, R. ; Kolozsvári, S. ; Bartosik, M. ; Mayrhofer, P.H. | Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti-Al-N thin films | Artikel Article  | 2016 |
| 22 | | Lazar, Petr ; Rashkova, Boriana ; Redinger, Josef ; Podloucky, Raimund ; Mitterer, Christian ; Scheu, Christina ; Dehm, Gerhard | Interface structure of epitaxial (111) VN films on (111) MgO substrates | Artikel Article | 2008 |
| 23 | | Eisenmenger-Sittner, Christoph ; Bangert, Herwig ; Joo, Hyun Youn ; Barna, Peter B. ; Kovács, A. | Lamellar growth in sputter-deposited aluminum-tin-aluminum sandwich layers | Artikel Article | 2005 |
| 24 | | Gall, S. ; Schneider, J. ; Klein, J. ; Hübener, K. ; Muske, M. ; Rau, B. ; Conrad, E. ; Sieber, I. ; Petter, K. ; Lips, K. ; Stöger-Pollach, M. ; Schattschneider, P. ; Fuhs, W. | Large-grained polycrystalline silicon on glass for thin-film solar cells | Artikel Article | 2006 |
| 25 | | Bohnenberger, Timo ; Schmid, Ulrich | Layer-by-layer approach for deposition of pure carbon nanotubes and composite films for use as electrodes in electrochemical devices | Artikel Article | 2014 |
| 26 | | Illarionov, Yu.Yu. ; Vexler, M.I. ; Fedorov, V.V. ; Suturin, S.M. ; Sokolov, N.S. | Light Emission from the Au/CaF2/p-Si(111) Capacitors: Evidence for an Elastic Electron Tunneling Through a Thin (1-2 nm) Fluoride Layer | Artikel Article | 2013 |
| 27 | | Bethge, Ole ; Abermann, Stephan ; Henkel, Christoph ; Bertagnolli, Emmerich | Low temperature atomic layer deposition of high-k dielectric stacks for scaled metal-oxide-semiconductor devices | Artikel Article | 2009 |
| 28 | | Frischmuth, Tobias ; Schneider, Michael ; Bogdanović Radović, Iva ; Siketić, Zdravko ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich | Lowtemperature deposition of a-SiC:H thin films applying a dual plasma source process | Artikel Article | 2016 |
| 29 | | Dergez, D. ; Schneider, M. ; Bittner, A. ; Schmid, U. | Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films | Artikel Article | 2015 |
| 30 | | Dergez, D. ; Schneider, M. ; Bittner, A. ; Pawlak, N. ; Schmid, U. | Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films | Artikel Article | 2016 |
| 11 | | Grosser, Michaela ; Seidel, Helmut ; Schmid, Ulrich | Microstructure and Mechanical Properties of Sputter Deposited Tantalum Nitride Thin Films after High Temperature Loading | Artikel Article | 2017 |
| 12 | | Stüber, M. ; Riedl, H. ; Wojcik, T. ; Ulrich, S. ; Leiste, H. ; Mayrhofer, P.H. | Microstructure of Al-containing magnetron sputtered TiB2 thin films | Artikel Article | 2019 |
| 13 | | Koch, T. ; Evaristo, M. ; Pauschitz, A. ; Roy, Manish ; Cavaleiro, A. | Nanoindentation and nanoscratch behaviour of reactive sputtered deposited W-S-C film | Artikel Article | 2009 |
| 14 | | Mathur, Sanjay ; Sivakov, Vladimir ; Shen, H. ; Barth, Sven Christian ; Cavelius, Christian ; Nilsson, Andreas ; Kuhn, Patrick | Nanostructured films of iron, tin and titanium oxides by chemical vapour deposition | Artikel Article | 28-Apr-2006 |
| 15 | | Triendl, F. ; Pfusterschmied, G. ; Fleckl, G. ; Schwarz, S. ; Schmid, U. | On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC | Artikel Article | 2020 |
| 16 | | Dalbauer, V. ; Ramm, J. ; Kolozsvári, S. ; Koller, C.M. ; Mayrhofer, P.H. | On the phase evolution of arc evaporated Al-Cr-based intermetallics and oxides | Artikel Article | 2017 |
| 17 | | Franz, R. ; Schnöller, J. ; Hutter, H. ; Mitterer, C. | Oxidation and diffusion study on AlCrVN hard coatings using oxygen isotopes ¹⁶O and ¹⁸O | Artikel Article | 2011 |
| 18 | | Stöger-Pollach, M. ; Walter, T. ; Muske, M. ; Gall, S. ; Schattschneider, P. | Phase transformations of an alumina membrane and its influence on silicon nucleation during the aluminium induced layer exchange | Artikel Article | 2007 |
| 19 | | Stöger-Pollach, Michael ; Walter, Thomas ; Muske, M ; Gall, S ; Schattschneider, Peter | Phase transformations of an alumina membrane and its influence on silicon nucleation during the aluminium induced layer exchange | Artikel Article | 2007 |
| 20 | | Gablech, Imrich ; Svatoš, Vojtěch ; Caha, Ondřej ; Dubroka, Adam ; Pekárek, Jan ; Klempa, Jaroslav ; Neužil, Pavel ; Schneider, Michael ; Šikola, Tomáš | Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup | Artikel Article | 2019 |
