Ruiz, D., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Gimzewski, J. K., & Sánchez-Rojas, J. L. (2011). Characterization of the first in-plane mode of AlN-actuated microcantilevers. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.886981
The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.
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Research Areas:
Materials Characterization: 10% Special and Engineering Materials: 20% Structure-Property Relationship: 15% Sensor Systems: 35% Sustainable and Low Emission Mobility: 10% Sustainable Production and Technologies: 10%
