Record link: 
http://hdl.handle.net/20.500.12708/163122
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Title: 
Characterization of the first in-plane mode of AlN-actuated microcantilevers
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Citation: 
Ruiz, D., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Gimzewski, J. K., & Sánchez-Rojas, J. L. (2011). Characterization of the first in-plane mode of AlN-actuated microcantilevers. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), Smart Sensors, Actuators, and MEMS V (pp. 1–7). SPIE. https://doi.org/10.1117/12.886981
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Publisher DOI: 
10.1117/12.886981
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Language: 
English
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Authors: 
Ruiz, David 
Hernando-Garcia, J. 
Ababneh, A. 
Seidel, Helmut 
Schmid, Ulrich 
Gimzewski, J.K. 
Sánchez-Rojas, José Luis 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
Smart Sensors, Actuators, and MEMS V 
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Volume: 
8066
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Date (published): 
2011
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Event name: 
Smart Sensors, Actuators, and MEMS V 
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Event date: 
18-Apr-2011 - 20-Apr-2011
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Event place: 
Prag, EU
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Number of Pages: 
7
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Publisher: 
SPIE
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Keywords: 
AlN; MEMS; piezoelectric; resonators; in-plane motion
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Abstract: 
The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.
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Research Areas: 
Materials Characterization: 10%
Special and Engineering Materials: 20%
Structure-Property Relationship: 15%
Sensor Systems: 35%
Sustainable and Low Emission Mobility: 10%
Sustainable Production and Technologies: 10%
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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