Record link: 
http://hdl.handle.net/20.500.12708/174372
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Title: 
Simulation of Critical IC-Fabrication Steps
en
Citation: 
Pichler, P., Jüngling, W., Selberherr, S., Guerrero, E., & Pötzl, H. (1985). Simulation of Critical IC-Fabrication Steps. IEEE Transactions on Electron Devices, 32(10), 1940–1953. https://doi.org/10.1109/t-ed.1985.22226
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Publisher DOI: 
10.1109/t-ed.1985.22226
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Pichler, P. 
Jüngling, Werner 
Selberherr, Siegfried 
Guerrero, E. 
Pötzl, Hans 
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Organisational Unit: 
E366 - Institut für Sensor- und Aktuatorsysteme 
E360 - Institut für Mikroelektronik 
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Journal: 
IEEE Transactions on Electron Devices 
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ISSN: 
0018-9383
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Date (published): 
1985
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Number of Pages: 
14
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Electronic, Optical and Magnetic Materials
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Science Branch: 
Elektrotechnik, Elektronik
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