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Year of Publication
Record link:
http://hdl.handle.net/20.500.12708/174372
-
Title:
Simulation of Critical IC-Fabrication Steps
en
Citation:
Pichler, P., Jüngling, W., Selberherr, S., Guerrero, E., & Pötzl, H. (1985). Simulation of Critical IC-Fabrication Steps.
IEEE Transactions on Electron Devices
,
32
(10), 1940–1953. https://doi.org/10.1109/t-ed.1985.22226
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Publisher DOI:
10.1109/t-ed.1985.22226
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Publication Type:
Article - Original Research Article
en
Language:
English
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Authors:
Pichler, P.
Jüngling, Werner
Selberherr, Siegfried
Guerrero, E.
Pötzl, Hans
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Organisational Unit:
E366 - Institut für Sensor- und Aktuatorsysteme
E360 - Institut für Mikroelektronik
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Journal:
IEEE Transactions on Electron Devices
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ISSN:
0018-9383
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Date (published):
1985
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Number of Pages:
14
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Peer reviewed:
Yes
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Keywords:
Electrical and Electronic Engineering; Electronic, Optical and Magnetic Materials
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Science Branch:
Elektrotechnik, Elektronik
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Appears in Collections:
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