Record link: 
http://hdl.handle.net/20.500.12708/225115
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Title: 
Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing
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Citation: 
Fugger, A., Jelinek, M., & Valtiner, M. (2025). Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 566. https://doi.org/10.1016/j.nimb.2025.165777
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Publisher DOI: 
10.1016/j.nimb.2025.165777
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Publication Type: 
Article - Original Research Article
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Language: 
English
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Authors: 
Fugger, Andrea 
Jelinek, Moriz 
Valtiner, Markus 
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Organisational Unit: 
E134-02 - Forschungsbereich Applied Interface Physics 
E056-12 - Fachbereich ENROL DP 
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Journal: 
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 
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ISSN: 
0168-583X
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Date (published): 
Sep-2025
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Number of Pages: 
8
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Publisher: 
ELSEVIER
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Peer reviewed: 
Yes
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Keywords: 
Proton irradiation; gamma emission; neutron emission; Semiconductor Manufacturing
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Abstract: 
Proton implantation has multiple uses in semiconductor manufacturing. Implanting through metallization can create problems in terms of radiation safety. Gamma and neutron emissions for proton irradiated stacks of Ti, TiN, W, AlCu, Si, Co with incident proton energies of 1 MeV to 2 MeV were measured. The most intense gamma lines resulted from Al, Si, F and Ti. Despite being present in trace amounts, F was found to contribute significantly to the gamma emission. Our results indicate a need for new metallization concepts to be used together with proton implantation.
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Research Areas: 
Materials Characterization: 100%
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Science Branch: 
1030 - Physik, Astronomie: 100%
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